Jean-Pierre Raskin

• 

  Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

  Denis Flandre, Jean Laconte, Jean-Pierre Raskin

  • Springer
  • 11 Octobre 2006
  • 9780387288437

  Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-inte...

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